1

Unit limit pressure

＜1.5×10^-4pa

2

Unit pumping rate

600L/S

3

Molecular pump compression ratio

＞10⁹

N2

4

System uses vacuum pressure

6×10^-2pa

5

Vacuum valve drive mode

Manual

6

Air charging valve drive mode

Manual

7

Extreme pressure of the front stage vacuum pump

5×10^-2Pa

8

Front stage vacuum pump power

1.1Kw

9

Molecular pump rated speed

24000rpm

10

Vacuum set air inlet flange

DN150

11

Exhaust flange

KF40

12

Molecular pump recommended starting pressure

＜1×10¹pa

13

Molecular pump starting time

4.5 min

14

Molecular pump downtime

7 min

15

Cooling mode

Air cooling

16

Power request

220/50Hz

1

Compound molecular vacuum pump

TYFB-600

1 Set

2

Molecular pump power

TYFB-600

1   Set

3

Rotary vane vacuum pump

VRD-30

1   Set

4

Vacuum baffle valve

GD-J63

1   Set

5

Air charging valve

KF16

1   Set

6

Corrugated pipe

KF40*1000

1 Pcs

7

Connector

DN150/DN63

1 Pcs

8

Variable diameter spool

KF40/KF16

1 Pcs

9

Vacuum blind flange

KF16

1 Pcs

10

Clamp

KF40

3 Set

11

Clamp

KF16

2   Set

12

Calipers bolt

M10

4   Set

13

Power source & control

1   Set

14

Mobile rack

650*850*1000

1   Set

15

Sealing part

1   Set

16

Fasteners

1   Set

17

Accessary

1   Set